Methods of forming contact openings, making electrical interconnections, and related integrated circuitry are described. Integrated circuitry formed through one or more of the inventive methodologies is also described. In one implementation, a conductive runner or line having a contact pad with which...http://www.google.es/patents/US6753241?utm_source=gb-gplus-sharePatente US6753241 - Semiconductor processing methods of forming contact openings, methods of forming electrical connections and interconnections, and integrated circuitry
Semiconductor processing methods of forming contact openings, methods of ...
