A first embodiment microneedle array is constructed of silicon and silicon dioxide compounds using MEMS technology and standard microfabrication techniques to create hollow cylindrical individual microneedles. The resulting array of microneedles can penetrate with a small pressure through the stratum...http://www.google.es/patents/US6379324?utm_source=gb-gplus-sharePatente US6379324 - Intracutaneous microneedle array apparatus
