A method of evaluating the cross-correlation properties of microroughness present at the interfaces in dielectric stacks is based on a comparison between observed and calculated angular distribution of scattered light. The calculation is based on a first-order perturbation treatment of the interaction...http://www.google.es/patents/US4548506?utm_source=gb-gplus-sharePatente US4548506 - Nondestructive analysis of multilayer roughness correlation
Nondestructive analysis of multilayer roughness correlation
