A mounting surface of an electrode for mounting an object to be processed thereon is projected to be a curved surface identical to a curved surface obtained by deforming the object to be processed by a uniform load, and etching of the object to be processed is performed. Etching of the object to be processed...http://www.google.es/patents/US4931135?utm_source=gb-gplus-sharePatente US4931135 - Etching method and etching apparatus
