A positioning device includes a table (101, 213) guided by a carriage (15, 199), the carriage (15, 199) being displaceable in two coordinate directions (X, Y) with respect to the base (3) and the table (101, 213) being displaceable with respect to the carriage (15, 199) in the same coordinate directions...http://www.google.es/patents/US5120034?utm_source=gb-gplus-sharePatente US5120034 - Two-step positioning device using Lorentz forces and a static gas bearing
Two-step positioning device using Lorentz forces and a static gas bearing
