A drain port and an exhaust port arranged at the bottom of a cup surrounding a substrate holding unit. A drainage tray is arranged below the cup so as to cover the moving area of the drain port when the substrate holding unit and the cup move in X-directions and Y-directions. An exhaust unit is arranged...http://www.google.es/patents/US8088455?utm_source=gb-gplus-sharePatente US8088455 - Laser treatment apparatus
