An illumination device for scanning exposure apparatus for carrying out exposure even when a movable stage is being accelerated and decelerated. The apparatus includes an illumination-distribution varying device for temporarily varying the illumination distribution of an illumination unit that is performing...http://www.google.es/patents/US6788391?utm_source=gb-gplus-sharePatente US6788391 - Illumination device, exposure apparatus and exposure method
Illumination device, exposure apparatus and exposure method
