A discharge reaction apparatus utilizing dynamic magnetic field for subjecting the surface of an object to a depositing or an etching process is disclosed. The apparatus comprises a member for generating dynamic magnetic field along the surface of an electrode and a member for limiting or forbidding...http://www.google.es/patents/US4829215?utm_source=gb-gplus-sharePatente US4829215 - Discharge reaction apparatus utilizing dynamic magnetic field
Discharge reaction apparatus utilizing dynamic magnetic field