An interface apparatus for transferring substrates between processing apparatus which provide various treatments for the substrates. The interface apparatus includes a transfer mechanism which, during a normal operation, receives substrates from an upstream processing apparatus and delivers the substrates...http://www.google.es/patents/US5308210?utm_source=gb-gplus-sharePatente US5308210 - Interface apparatus for transporting substrates between substrate processing apparatus
Interface apparatus for transporting substrates between substrate processing ...
