An optical integrated oxide device uses a silicon-based functional matrix substrate on which both an oxide device and a semiconductor light emitting device can be commonly integrated with an optimum structure and a high density. A single-crystal Si substrate has formed on its surface a first region where...http://www.google.es/patents/US6278138?utm_source=gb-gplus-sharePatente US6278138 - Silicon-based functional matrix substrate and optical integrated oxide device
Silicon-based functional matrix substrate and optical integrated oxide device
