An IC tester including a specimen chamber and an electron optical column for radiating an electron beam to a specimen placed in the specimen chamber, wherein a fixed table is attached to a Z table in the specimen chamber and includes downwardly protruding spring contact pins which are connected to lead...http://www.google.es/patents/US4532423?utm_source=gb-gplus-sharePatente US4532423 - IC Tester using an electron beam capable of easily setting a probe card unit for wafers & packaged IC's to be tested
IC Tester using an electron beam capable of easily setting a probe card unit ...
