A spatial light modulator comprises an array of micromirror devices each of which has a reflective and deflectable mirror plates. The mirror plates are moved between an ON and OFF state during operation, wherein the OFF state is a state wherein the mirror plate is not parallel to the substrate on which...http://www.google.es/patents/US7411717?utm_source=gb-gplus-sharePatente US7411717 - Micromirror device
