A piezoelectric/electrostrictive actuator including a ceramic base member having a pressure chamber or chambers, and a piezoelectric/electrostrictive element or elements is disclosed. The base member includes a spacer plate having at least one window which provides the pressure chamber(s), and which...http://www.google.es/patents/US5475279?utm_source=gb-gplus-sharePatente US5475279 - Piezoelectric/electrostrictive actuator having integral ceramic base member and film-type piezoelectric/electrostrictive element (S)
Piezoelectric/electrostrictive actuator having integral ceramic base member ...
