The present invention is directed to electrostatic chucks, methods for their use, the electrostatic deposition of objects, such as particles in a dry powder, onto recipient substrates, and the recipient substrates themselves that have been subjected to electrostatic deposition. In one aspect, the present...http://www.google.es/patents/US6670038?utm_source=gb-gplus-sharePatente US6670038 - Method of depositing particles with an electrostatic chuck
Method of depositing particles with an electrostatic chuck
