A method of displacing a supercritical fluid from a pressure vessel (e.g., in a microelectronic manufacturing process), comprises the steps of: providing an enclosed pressure vessel containing a first supercritical fluid (said supercritical fluid preferably comprising carbon dioxide); adding a second...http://www.google.es/patents/US20040020518?utm_source=gb-gplus-sharePatente US20040020518 - Methods for transferring supercritical fluids in microelectronic and other industrial processes
Methods for transferring supercritical fluids in microelectronic and other ...
Número de solicitud: 10/448,474 Número de publicación: US 2004/0020518 A1 Fecha de presentación: 30 May 2003 Patente emitida: US6905555 ( Fecha de emisión 14 Jun 2005)
