A method for rapid preventing particles in a pre-clean chamber according to the invention includes a silica material supply step for providing a silica material in the pre-clean chamber, a gas supply step for providing oxygen gas and sputtering gas into the pre-clean chamber, and a plasma generating...http://www.google.es/patents/US6516814?utm_source=gb-gplus-sharePatente US6516814 - Method of rapid prevention of particle pollution in pre-clean chambers
Method of rapid prevention of particle pollution in pre-clean chambers
