A tantalum oxide dielectric film includes tantalum oxide (Ta.sub.2 O.sub.5) as a major component, and at least one oxide selected from the group consisting of yttrium oxide (Y.sub.2 O.sub.3), tungsten oxide (WO.sub.3) and niobium oxide (Nb.sub.2 O.sub.5). This dielectric film exhibits a remarkably improved...http://www.google.es/patents/US5225286?utm_source=gb-gplus-sharePatente US5225286 - Dielectric film
