Semiconductor processing equipment that has increased efficiency, throughput, and stability, as well as reduced operating cost, footprint, and faceprint is provided. Other than during deposition, the atmosphere of both the reaction chamber and the transfer chamber are evacuated using the transfer chamber...http://www.google.es/patents/US6899507?utm_source=gb-gplus-sharePatente US6899507 - Semiconductor processing apparatus comprising chamber partitioned into reaction and transfer sections
Semiconductor processing apparatus comprising chamber partitioned into ...
