A salicide heater structure for use in thermo-optic and other heat-influenced semiconductor devices is disclosed. In one example embodiment, a system is provided that includes a silicon substrate, and a salicide heating element formed on the substrate, for delivering heat radiation to a heat-influenced...http://www.google.es/patents/US7693354?utm_source=gb-gplus-sharePatente US7693354 - Salicide structures for heat-influenced semiconductor applications
Salicide structures for heat-influenced semiconductor applications
