An end effector has a tower with non-stacked spatulas. Tolerance stacking is avoided by making grooves in the tower relative to a common reference surface, and mounting the spatulas in such grooves. The grooves are provided in separate planar walls of the tower. The walls intersect to enhance the structural...http://www.google.es/patents/US6073828?utm_source=gb-gplus-sharePatente US6073828 - End effector for substrate handling and method for making the same
End effector for substrate handling and method for making the same
