A dilution stage is adapted to supply a dilute chemistry to a semiconductor device processing apparatus. The dilution stage includes a first vessel adapted to store the chemistry after dilution and a second vessel adapted to store the chemistry prior to dilution. The dilution stage may also include a...http://www.google.es/patents/US7063455?utm_source=gb-gplus-sharePatente US7063455 - Chemical dilution system for semiconductor device processing system
Chemical dilution system for semiconductor device processing system
