Embodiments of the invention comprise a machine adapted for polishing work pieces such as large silicon wafers. A wafer polishing machine in accord with the invention comprises a rotatable platen in a table base, above which is mounted a lid having a head moving assembly with four synchronously rotatable...http://www.google.es/patents/US8137162?utm_source=gb-gplus-sharePatente US8137162 - Semiconductor wafer polishing machine
