Additional vibrations are added during the exposure of a substrate so that vibrations occurring during exposure of a plurality of areas on the substrate are substantially uniform. This may improve CD uniformity. ...http://www.google.es/patents/US20060066828?utm_source=gb-gplus-sharePatente US20060066828 - Lithographic apparatus, device manufacturing method and computer program product
Lithographic apparatus, device manufacturing method and computer program product
Número de solicitud: 10/951,028 Número de publicación: US 2006/0066828 A1 Fecha de presentación: 28 Sep 2004 Patente emitida: US7355674 ( Fecha de emisión 8 Abr 2008)
