Described is a space-conserving integrated fluid delivery system particularly useful for gas distribution in semiconductor processing equipment. The system includes integrated fluid flow network architecture, and may include, in addition to a layered substrate containing fluid flow channels, various...http://www.google.es/patents/US7850786?utm_source=gb-gplus-sharePatente US7850786 - Method of improving corrosion resistance of stainless steel surfaces by a process of passivation
Method of improving corrosion resistance of stainless steel surfaces by a ...