An alignment check pattern formed by a first insulating film; a first dummy pattern formed on a surface of said first insulating film; a second insulating film formed on a composite surface of said first insulating film and said first dummy pattern; a second dummy pattern formed on said second film,...http://www.google.es/patents/US5308682?utm_source=gb-gplus-sharePatente US5308682 - Alignment check pattern for multi-level interconnection
Alignment check pattern for multi-level interconnection
