A method for forming a cantilever beam probe card on a semiconducting substrate and the probe card fabricated by such method are described. The method utilizes the deposition of two separate metal layers of different metals for forming a cantilever beam and a microprobe for use as a probe needle. A sacrificial,...http://www.google.es/patents/US6651325?utm_source=gb-gplus-sharePatente US6651325 - Method for forming cantilever beam probe card and probe card formed
Method for forming cantilever beam probe card and probe card formed
