A method for creating emitters of a field emission device is provided. First, a hardmask layer is deposited on a substrate used to form emitters. On the hardmask layer, a photoresist layer is deposited. Islands of photoresist are exposed by an exposing energy through holes in a mask layer. The mask layer...http://www.google.es/patents/US6095882?utm_source=gb-gplus-sharePatente US6095882 - Method for forming emitters for field emission displays
Method for forming emitters for field emission displays
