A cathode arc source has means for generating first and second magnetic fields, of opposite or reverse direction to each other. The resultant magnetic field includes a null point between the target and the substrate, though close to the target. Field strength normal to the target is zero at the null...http://www.google.es/patents/US6761805?utm_source=gb-gplus-sharePatente US6761805 - Cathode arc source with magnetic field generating means positioned above and below the cathode
Cathode arc source with magnetic field generating means positioned above and ...
