A manufacturing method is provided for a voltage controlled oscillator comprising an thin film BAW resonator and a variable capacitor element. The thin film BAW resonator includes an anchor section formed on a Si substrate, a lower electrode supported on the anchor section and positioned to face the...http://www.google.es/patents/US7490390?utm_source=gb-gplus-sharePatente US7490390 - Method of manufacturing a voltage controlled oscillator
Method of manufacturing a voltage controlled oscillator
