An apparatus and method for depositing plural layers of materials on a substrate within a single vacuum chamber allows high-throughput deposition of structures such as these for GMR and MRAM application. An indexing mechanism aligns a substrate with each of plural targets according to the sequence of...http://www.google.es/patents/US6905578?utm_source=gb-gplus-sharePatente US6905578 - Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure
Apparatus and method for multi-target physical-vapor deposition of a multi ...
