There is provided a method in which a TFT with superior electrical characteristics is manufactured and a high performance semiconductor device is realized by assembling a circuit with the TFT. The method of manufacturing the semiconductor device includes: a step of forming a crystal-containing semiconductor...http://www.google.es/patents/US6559036?utm_source=gb-gplus-sharePatente US6559036 - Semiconductor device and method of manufacturing the same
Semiconductor device and method of manufacturing the same
