Methods and systems that include a nanotube used as an emitter in the testing and fabrication of integrated circuits. The nanotube emits a signal to a substrate. Based on the signal or the electrical properties, e.g., current induced in the substrate by the signal, the region of the substrate is characterized....http://www.google.es/patents/US7662648?utm_source=gb-gplus-sharePatente US7662648 - Integrated circuit inspection system
