Embodiments of multi-layer three-dimensional structures and formation methods provide structures with effective feature (e.g. opening) sizes (e.g. virtual gaps) that are smaller than a minimum feature size (MFS) that exists on each layer as a result of the formation method used in forming the structures....http://www.google.es/patents/US20050126916?utm_source=gb-gplus-sharePatente US20050126916 - Three-dimensional structures having feature sizes smaller than a minimum feature size and methods for fabricating
Three-dimensional structures having feature sizes smaller than a minimum ...
Número de solicitud: 10/949,744 Número de publicación: US 2005/0126916 A1 Fecha de presentación: 24 Sep 2004 Patente emitida: US7498714 ( Fecha de emisión 3 Mar 2009)
