The energy distribution of the beam spot on the irradiated surface changes due to the change in the oscillation condition of the laser or before and after the maintenance. The present invention provides an optical system for forming a rectangular beam spot on an irradiated surface including a beam homogenizer...http://www.google.es/patents/US7169630?utm_source=gb-gplus-sharePatente US7169630 - Beam homogenizer, laser irradiation apparatus, and method for manufacturing semiconductor device
Beam homogenizer, laser irradiation apparatus, and method for manufacturing ...
