A vacuum processing apparatus is composed of a cassette block and a vacuum processing block. The cassette block has a cassette table for mounting a plurality of cassettes containing a sample and an atmospheric transfer means. The vacuum processing block has a plurality of processing chambers for performing...http://www.google.es/patents/US6752580?utm_source=gb-gplus-sharePatente US6752580 - Vacuum processing apparatus and semiconductor manufacturing line using the same
Vacuum processing apparatus and semiconductor manufacturing line using the same
