An accelerometer (305) for measuring seismic data. The accelerometer (305) includes an integrated vent hole for use during a vacuum sealing process and a balanced metal pattern for reducing cap wafer bowing. The accelerometer (305) also includes a top cap press frame recess (405) and a bottom cap press...http://www.google.es/patents/US6871544?utm_source=gb-gplus-sharePatente US6871544 - Sensor design and process
