A method for imaging a non-planar resist uses a non-integrating resist. The resist may be a thermoresist which changes from an unexposed state to an exposed state upon heating to a threshold temperature. The method involves using a variable focus optical system and making a plurality of exposures at...http://www.google.es/patents/US6387597?utm_source=gb-gplus-sharePatente US6387597 - Method for exposing features on non-planar resists
Method for exposing features on non-planar resists
