A method of preventing the scrapping of semiconductor substrates due to improper deposition of thin films in a thin film vaporization system is disclosed. This is accomplished by providing a method of self-calibrating and testing the flow of liquid precursors in the vaporization system prior to the start...http://www.google.es/patents/US7029928?utm_source=gb-gplus-sharePatente US7029928 - Real-time detection mechanism with self-calibrated steps for the hardware baseline to detect the malfunction of liquid vaporization system in AMAT TEOS-based Dxz chamber
Real-time detection mechanism with self-calibrated steps for the hardware ...
