An apparatus capable of high accuracy position and motion control utilizes one or more linear commutated motors to move a guideless stage in one long linear direction and small yaw rotation in a plane. A carrier/follower holding a single voice coil motor (VCM) is controlled to approximately follow the...http://www.google.es/patents/US6844695?utm_source=gb-gplus-sharePatente US6844695 - Electromagnetic alignment and scanning apparatus
