A semiconductor apparatus which allows for an increase in the surface area of a lower electrode constituting a concave capacitor, and is capable of increasing the capacitance of an MIM structure, and a method of making such a semiconductor apparatus are provided. On a sidewall section of an amorphous...http://www.google.es/patents/US20020175329?utm_source=gb-gplus-sharePatente US20020175329 - Semiconductor apparatus and method of making same
