There is disclosed a method of recycling a delaminated wafer produced as a by-product in producing an SOI wafer according to a hydrogen ion delaminating method by reprocessing it for reuse as a silicon wafer, wherein at least polishing of the delaminated wafer for removing of a step in the peripheral...http://www.google.es/patents/US20010029072?utm_source=gb-gplus-sharePatente US20010029072 - Method of recycling a delaminated wafer and a silicon wafer used for the recycling
Method of recycling a delaminated wafer and a silicon wafer used for the ...
