A semiconductor device fabrication apparatus having multiple processing chambers for different processes, where a substrate is carried in and out in a sophisticated manner, with their different internal ambient conditions being retained, so that the substrate is free from contamination, thereby manufacturing...http://www.google.es/patents/US5981399?utm_source=gb-gplus-sharePatente US5981399 - Method and apparatus for fabricating semiconductor devices
Method and apparatus for fabricating semiconductor devices
