A substrate processing apparatus includes a transport robot (TR1) formed with a telescopic vertical movement mechanism of a so-called telescopically nestable multi-tier construction. A drive mechanism (D1) is initially driven to move a support member (48) upwardly to simultaneously elevate a vertical...http://www.google.es/patents/US6371713?utm_source=gb-gplus-sharePatente US6371713 - Substrate processing apparatus
