A broad-bandwidth interferometric device is adapted for longitudinal insertion into a cylinder cavity to produce irradiance signals at multiple vertical-scanning positions as a function of optical path differences between a reference mirror incorporated in the probe and the cylinder-wall surface. The...http://www.google.es/patents/US5640270?utm_source=gb-gplus-sharePatente US5640270 - Orthogonal-scanning microscope objective for vertical-scanning and phase-shifting interferometry
Orthogonal-scanning microscope objective for vertical-scanning and phase ...