A tunable microelectronic capacitor and a tunable microelectronic inductor, each utilizing a micro-actuator fabricated by MEMS technique as a major component in the capacitor, the micro-actuator drives a dielectric plate in between to electrode plates to vary the capacitance. In the inductor, the micro-actuator...http://www.google.es/patents/US6556415?utm_source=gb-gplus-sharePatente US6556415 - Tunable/variable passive microelectronic components
