A plurality of semiconductor bodies are produced by first depositing a mask layer on a main surface of a substrate wafer. A plurality of windows are next formed in the mask layer such that the wafer surface is laid bare in the windows. A semiconductor layer sequence defining the semiconductor bodies...http://www.google.es/patents/US6100104?utm_source=gb-gplus-sharePatente US6100104 - Method for fabricating a plurality of semiconductor bodies
Method for fabricating a plurality of semiconductor bodies
