Disclosed is a capacitor incorporating a material having a high dielectric constant and a method of fabricating the same. In a preferred embodiment, the bottom electrode is first deposited and patterned. A thick, planarized insulating layer is deposited over the bottom electrode and a contact via is...http://www.google.es/patents/US5985676?utm_source=gb-gplus-sharePatente US5985676 - Method of forming capacitor while protecting dielectric from etchants
Method of forming capacitor while protecting dielectric from etchants
