A processing chamber with a flow-restricting ring is generally provided. In one embodiment, a processing chamber includes a chamber body, a lid assembly, a substrate support and a flow-restricting ring. The chamber body has sidewalls and a bottom. The lid assembly is disposed on the sidewalls and encloses...http://www.google.es/patents/US6716287?utm_source=gb-gplus-sharePatente US6716287 - Processing chamber with flow-restricting ring
