A method for fabricating field emission arrays employs a single mask to define emitter tips, their corresponding resistors, and, optionally, conductive lines. One or more material layers from which the emitter tips and resistors will be defined are formed over and laterally adjacent substantially parallel...http://www.google.es/patents/US6713313?utm_source=gb-gplus-sharePatente US6713313 - Field emission arrays and method of fabricating emitter tips and corresponding resistors thereof with a single mask
Field emission arrays and method of fabricating emitter tips and ...
