A method of forming a resist on a substrate and processing the resist in a resist processing system having a processing region and a non-processing region which are air-conditioned, the method comprising the steps of, transferring the substrate into the non-processing region, coating the resist on the...http://www.google.es/patents/US6017663?utm_source=gb-gplus-sharePatente US6017663 - Method of processing resist utilizing alkaline component monitoring
Method of processing resist utilizing alkaline component monitoring
